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Quartz crystal microbalance : ウィキペディア英語版
Quartz crystal microbalance
A quartz crystal microbalance (QCM) measures a mass variation per unit area by measuring the change in frequency of a quartz crystal resonator. The resonance is disturbed by the addition or removal of a small mass due to oxide growth/decay or film deposition at the surface of the acoustic resonator. The QCM can be used under vacuum, in gas phase ("gas sensor", first use described by King) and more recently in liquid environments. It is useful for monitoring the rate of deposition in thin film deposition systems under vacuum. In liquid, it is highly effective at determining the affinity of molecules (proteins, in particular) to surfaces functionalized with recognition sites. Larger entities such as viruses or polymers are investigated, as well. QCM has also been used to investigate interactions between biomolecules. Frequency measurements are easily made to high precision (discussed below); hence, it is easy to measure mass densities down to a level of below 1 μg/cm2. In addition to measuring the frequency, the dissipation factor (equivalent to the resonance bandwidth) is often measured to help analysis. The dissipation factor is the inverse quality factor of the resonance, Q−1 = w/fr (see below); it quantifies the damping in the system and is related to the sample's viscoelastic properties.
== General ==
Quartz is one member of a family of crystals that experience the piezoelectric effect. The piezoelectric effect has found applications in high power sources, sensors, actuators, frequency standards, motors, etc., and the relationship between applied voltage and mechanical deformation is well known; this allows probing an acoustic resonance by electrical means. Applying alternating current to the quartz crystal will induce oscillations. With an alternating current between the electrodes of a properly cut crystal, a standing shear wave is generated. The Q factor, which is the ratio of frequency and bandwidth, can be as high as 106. Such a narrow resonance leads to highly stable oscillators and a high accuracy in the determination of the resonance frequency. The QCM exploits this ease and precision for sensing. Common equipment allows resolution down to 1 Hz on crystals with a fundamental resonant frequency in the 4 – 6 MHz range. A typical setup for the QCM contains water cooling tubes, the retaining unit, frequency sensing equipment through a microdot feed-through, an oscillation source, and a measurement and recording device.
The frequency of oscillation of the quartz crystal is partially dependent on the thickness of the crystal. During normal operation, all the other influencing variables remain constant; thus a change in thickness correlates directly to a change in frequency. As mass is deposited on the surface of the crystal, the thickness increases; consequently the frequency of oscillation decreases from the initial value. With some simplifying assumptions, this frequency change can be quantified and correlated precisely to the mass change using Sauerbrey's equation.
Other techniques for measuring the properties of thin films include Ellipsometry, Surface Plasmon Resonance (SPR) Spectroscopy, and Dual Polarisation Interferometry.

抄文引用元・出典: フリー百科事典『 ウィキペディア(Wikipedia)
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